S. Zotov, A. Srivastava, Ken Kwon, Jeremy Frank, Erwin Parco, Martin Williams, S. Shtigluz, Kenneth Lyons, M. Frazee, D. Hoyh, A. Lu
{"title":"基于石英MEMS的紧凑型导航级IMU","authors":"S. Zotov, A. Srivastava, Ken Kwon, Jeremy Frank, Erwin Parco, Martin Williams, S. Shtigluz, Kenneth Lyons, M. Frazee, D. Hoyh, A. Lu","doi":"10.1109/PLANS46316.2020.9109851","DOIUrl":null,"url":null,"abstract":"Emcore has demonstrated a miniaturized Inertial Measurement Unit (IMU), based on Systron Donner Inertial technology, with in-run navigation grade performance. The compact IMU is based on three quartz MEMS Coriolis Vibratory Gyroscopes (CVG) and three quartz MEMS resonant accelerometers. Experimental characterization of the gyroscopes revealed angle random walk of lower than 0.0008 °/ $\\sqrt{}$ hr (0.05 (°/hr)/ $\\sqrt{}$ Hz) with bias instability of 0.005 °/hr at stable temperature and on the order of 0.01 °/hr at uncontrolled temperature. The accelerometers demonstrated a velocity random walk of 50 ug/ $\\sqrt{}$ Hz, with bias instability of a few $\\mu$ g. This performance was achieved within the SDI500 form factor of 19 cubic inches.","PeriodicalId":273568,"journal":{"name":"2020 IEEE/ION Position, Location and Navigation Symposium (PLANS)","volume":"101 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Compact In-Run Navigation Grade IMU Based on Quartz MEMS\",\"authors\":\"S. Zotov, A. Srivastava, Ken Kwon, Jeremy Frank, Erwin Parco, Martin Williams, S. Shtigluz, Kenneth Lyons, M. Frazee, D. Hoyh, A. Lu\",\"doi\":\"10.1109/PLANS46316.2020.9109851\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Emcore has demonstrated a miniaturized Inertial Measurement Unit (IMU), based on Systron Donner Inertial technology, with in-run navigation grade performance. The compact IMU is based on three quartz MEMS Coriolis Vibratory Gyroscopes (CVG) and three quartz MEMS resonant accelerometers. Experimental characterization of the gyroscopes revealed angle random walk of lower than 0.0008 °/ $\\\\sqrt{}$ hr (0.05 (°/hr)/ $\\\\sqrt{}$ Hz) with bias instability of 0.005 °/hr at stable temperature and on the order of 0.01 °/hr at uncontrolled temperature. The accelerometers demonstrated a velocity random walk of 50 ug/ $\\\\sqrt{}$ Hz, with bias instability of a few $\\\\mu$ g. This performance was achieved within the SDI500 form factor of 19 cubic inches.\",\"PeriodicalId\":273568,\"journal\":{\"name\":\"2020 IEEE/ION Position, Location and Navigation Symposium (PLANS)\",\"volume\":\"101 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE/ION Position, Location and Navigation Symposium (PLANS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PLANS46316.2020.9109851\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE/ION Position, Location and Navigation Symposium (PLANS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLANS46316.2020.9109851","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Compact In-Run Navigation Grade IMU Based on Quartz MEMS
Emcore has demonstrated a miniaturized Inertial Measurement Unit (IMU), based on Systron Donner Inertial technology, with in-run navigation grade performance. The compact IMU is based on three quartz MEMS Coriolis Vibratory Gyroscopes (CVG) and three quartz MEMS resonant accelerometers. Experimental characterization of the gyroscopes revealed angle random walk of lower than 0.0008 °/ $\sqrt{}$ hr (0.05 (°/hr)/ $\sqrt{}$ Hz) with bias instability of 0.005 °/hr at stable temperature and on the order of 0.01 °/hr at uncontrolled temperature. The accelerometers demonstrated a velocity random walk of 50 ug/ $\sqrt{}$ Hz, with bias instability of a few $\mu$ g. This performance was achieved within the SDI500 form factor of 19 cubic inches.
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