椭圆偏振法测量毫米波区复介电常数

2003 33rd European Microwave Conference, 2003 Pub Date : 2003-10-01 DOI:10.1109/EUMA.2003.340996

K. Tsuzukiyama, T. Sakai, T. Yamazaki, O. Hashimoto

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引用次数: 2

摘要

将椭偏法推广到测量材料在毫米波区域的复介电常数。本文提出了一种基于傅里叶分析方法的有效方法来消除自由空间方法所带来的不确定性。采用改进的椭圆偏振法，即傅立叶分析校正椭圆偏振法，可以高精度地测量复介电常数。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Ellipsometry for Measurement of Complex Dielectric Permittivity in Millimeter-Wave Region

The ellipsometry method is extended to a measurement for complex permittivities of materials in millimeter-wave region. We propose an effective technique based on the Fourier analysis method to eliminate an uncertainty due to the free-space method. Complex permittivities can be measured with a high degree of accuracy by the improved ellipsometry method, as named Fourier Analysis Correction Ellipsometry (FACE) Method.

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2003 33rd European Microwave Conference, 2003

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