原子层沉积过程吹扫时间与粘性流动反应器出口尺寸的关系

{"title":"原子层沉积过程吹扫时间与粘性流动反应器出口尺寸的关系","authors":"Betelhiem N. Mengesha, M. Shaeri","doi":"10.11159/icffts21.109","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":101634,"journal":{"name":"Proceedings of the 2nd International Conference on Fluid Flow and Thermal Science (ICFFTS'21)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Dependency of Purge Duration of an Atomic Layer Deposition Process\\non the Outlet Size of a Viscous Flow Reactor\",\"authors\":\"Betelhiem N. Mengesha, M. Shaeri\",\"doi\":\"10.11159/icffts21.109\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":101634,\"journal\":{\"name\":\"Proceedings of the 2nd International Conference on Fluid Flow and Thermal Science (ICFFTS'21)\",\"volume\":\"46 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2nd International Conference on Fluid Flow and Thermal Science (ICFFTS'21)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.11159/icffts21.109\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2nd International Conference on Fluid Flow and Thermal Science (ICFFTS'21)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.11159/icffts21.109","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}