温度对FBAR频率特性的影响

Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications Pub Date : 2014-12-29 DOI:10.1109/SPAWDA.2014.6998603

Dejin Huang, Ji Wang

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引用次数: 3

摘要

研究了温度对薄膜体声谐振器(FBAR)在厚度-拉伸模式下共振特性的影响。基于压电材料的基本压电弹性方程，推导了理想FBAR在正弦激励电压下的振动方程。然后利用边界条件得到了解。给出了串联谐振频率和并联谐振频率，讨论了温度对谐振频率、带宽和有效机电耦合系数的影响。最后给出了数值算例。这些结果对改进FBAR的设计具有一定的指导意义。

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Effects of temperature on frequency properties of FBAR

This paper investigated the effects of temperature on resonance properties of Film Bulk Acoustic Resonator (FBAR) in thickness-stretch mode. Based on the fundamental piezoelastic equations of piezoelectric material, the vibration equation of ideal FBAR under sine excitation voltage is derived. The solution is then obtained by using of the boundary conditions. The series and parallel resonance frequency were presented, and the effects of temperature on resonance frequency, bandwidth, and effective electromechanical coupling coefficient were discussed. A numerical example was presented to show the effects. These results are useful for the improvement of designing FBAR.

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Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications

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