在半导体制造工厂中有效的设置/调度策略

S. Sethi, K. Chu, Houmin Yan
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引用次数: 8

摘要

半导体制造需要重复使用几种类似的加工操作。出于经济上的考虑,这些昂贵的机器总是在许多产品或在其制造过程的不同阶段的产品中共享。机器需要在不同产品的生产之间或同一产品的不同条目之间进行设置。由于一个产品可以多次进入机器进行加工,因此制造系统通常被称为再入车间。本文研究了半导体制造环境中周期时间均值和方差的减小问题。制造系统通常以两种主要方式进行控制。在第一个系统中,发布策略指定何时将新批发布到系统中。而在第二种调度策略中,调度策略控制系统中已经存在的批。它决定哪批货在每台机器上下一步加工,当它可以加工时。以往对制造系统控制的大量研究主要集中在瓶颈机的控制上。制造系统的性能指标取决于产品之间争夺机器的冲突解决方式。Lu等人(1994)为切换产品时不需要机器设置的系统开发了一类调度策略。我们处理一种更一般的情况,即机器需要设置。我们引入了包含设置的调度策略,因为在文献中为不需要设置的系统开发的策略被发现对于需要大量设置的系统表现不佳。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Efficient setup/dispatching policies in a semiconductor manufacturing facility
Semiconductor manufacturing requires repetitive use of several similar processing operations. Owing to economic considerations, these expensive machines are always shared among many products or a product at different stages of its manufacturing process. The machines require setups between the production of different products or different entries of the same product. Since a product may enter a machine several times for processing, the manufacturing system is often called a re-entrant shop. We consider the problem of reducing mean and variance of the cycle time in semiconductor manufacturing environments. Manufacturing systems are usually controlled in two major ways. In the first, a release policy specifies when new lots are to be released into the system. Whereas in the second, a scheduling policy controls the lots already in the system. It decides which lot is to be processed next at each machine, when it becomes available for processing. A bulk of previous research on the control of manufacturing systems focuses on the control of bottleneck machines. Performance measures of a manufacturing system depends on the ways in which the conflicts are resolved between products competing for the machines. Lu et al. (1994) develop a class of scheduling policies for systems where there is no machine setup required when switching products. We deal with a more general situation in which the machines require setups. We introduce scheduling policies incorporating setups, since the policies developed in the literature for systems requiring no setups are found to perform poorly for systems requiring considerable setups.
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