用一维微波光子晶体测定半导体薄层的参数

2012 19th International Conference on Microwaves, Radar & Wireless Communications Pub Date : 2012-05-21 DOI:10.1109/MIKON.2012.6233624

D. Ponomarev, S. Nikitov, D. Usanov, A. Skripal, A. Postelga

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引用次数: 3

摘要

利用微波波段反射光谱和透射光谱的测量结果，可以同时测定一维波导光子晶体中起不规则作用的半导体薄层的厚度和电导率。给出了计算机建模和反问题求解的结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Determination of parameters of thin semiconductor layers by means of one-dimensional microwave photonic crystals

The possibility to simultaneously determine the thickness and the electrical conductivity of thin semiconductor layer, which play a role of the irregularity in one-dimensional waveguide photonic crystals, using the results of measurement of reflection and transmission spectra in microwave band has been shown. The results of computer modeling and the inverse problem solving are presented.

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来源期刊

2012 19th International Conference on Microwaves, Radar & Wireless Communications

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