用于原位测量的双节点薄膜热电偶

2022 International Conference on Automation, Robotics and Computer Engineering (ICARCE) Pub Date : 2022-12-16 DOI:10.1109/ICARCE55724.2022.10046476

Rong Ma, Meiju Zhang, Zhongkai Zhang, Manguo Huang, Xiaobo Liang, Jiangjiang Liu, Zhaojun Liu, B. Tian

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引用次数: 0

摘要

介绍了一种新型高性能钨铼薄膜热电偶的设计、制造、测试和实现。本文以钨铼TFTCs为研究对象，在COMSOL软件中进行仿真分析和设计后，采用丝网印刷技术和磁控溅射技术制备了钨铼TFTCs。这种薄膜热电偶主要采用两种不同成分组合的电极材料，主要是含5%铼的钨和含26%铼的钨。此外，进行高温退火以保持机械性能，从而提高热电性能。结果表明，该系统在150 ~ 600℃的温度范围内性能可靠，重复性为2.02%，为高温原位传感提供了应用价值。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Double Node Thin-Film Thermocouples for In-Situ Measurement

The design, fabrication, testing and implementation of a new high-performance tungsten-rhenium thin film thermocouple are introduced. In this paper, tungsten-rhenium TFTCs are taken as the research object, after simulation analysis in COMSOL software and design, it is made by screen-printing technology and magnetron sputtering. This kind of thin film thermocouple primarily utilizes two kinds of electrode materials with varying composition combination, mainly tungsten with 5% rhenium and tungsten with 26% rhenium. Furthermore, high-temperature annealing is performed to maintain the mechanical properties and thus improve thermoelectric performance. The results demonstrate that the performance is reliable in the temperature range of 150-600 C° with a repeatability of 2.02%, providing application value for high-temperature in-situ sensing.

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2022 International Conference on Automation, Robotics and Computer Engineering (ICARCE)

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