超薄芯片，坡莫合金薄膜，用于高性能MS/RF CMOS

Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004. Pub Date : 2004-06-15 DOI:10.1109/VLSIT.2004.1345490

T. Ohguro, N. Sato, M. Matsuo, K. Kojima, H. Momose, K. Ishimaru, H. Ishiuchi

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