60兆赫的酒杯微机械盘参考振荡器

2004 IEEE International Solid-State Circuits Conference (IEEE Cat. No.04CH37519) Pub Date : 2004-09-13 DOI:10.1109/ISSCC.2004.1332724

Yu-Wei Lin, Seungbae Lee, Sheng-Shian Li, Yuan Xie, Z. Ren, C. Nguyen

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引用次数: 65

摘要

一个参考振荡器利用60MHz，基于mems，葡萄酒玻璃盘振动微机械谐振器，其Q为48,000，并具有足够的功率处理能力，以实现-130dBc/Hz的远载波相位噪声。当细分到10MHz时，这对应于-145dBc/Hz的有效电平。

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60-MHz wine-glass micromechanical-disk reference oscillator

A reference oscillator utilizing a 60MHz, MEMS-based, wine glass disk vibrating micromechanical resonator with a Q of 48,000 and sufficient power handling capability to achieve a far-from-carrier phase noise of -130dBc/Hz is demonstrated. When divided down to 10MHz, this corresponds to an effective level of -145dBc/Hz.

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来源期刊

2004 IEEE International Solid-State Circuits Conference (IEEE Cat. No.04CH37519)

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