Integrated microelectromechanical systems in the More than Moore era

The classical IC integration roadmap has followed the Moore law for decades bringing up an impressive transistor scaling evolution resulting in a profound transformation of our quotidian practices. Current trends face the development of integrating multi-domain magnitudes within current systems, demanding a wider diversification of the parameters being managed and enabling what has been named as the More than Moore paradigm. The monolithic integration of such diversity of magnitudes is a challenge that will enable low-cost, highly complex personal systems. A view for the specific microelectromechanical domain will be shared.