可控微机械电容式超声换能器的三维仿真

1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027) Pub Date : 1999-10-17 DOI:10.1109/ULTSYM.1999.849202

M. Kaltenbacher, H. Landes, K. Niederer, R. Lerch

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引用次数: 13

摘要

提出了一种能够有效计算浸入声流体中的静电换能器的有限元模拟方案。该计算格式已应用于表面微加工电容式超声阵列的动力学行为研究。为了提高换能器的动力学和效率，设计并测试了一种控制器。从而减少了阵内的静振时间和声串扰。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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3D simulation of controlled micromachined capacitive ultrasound transducers

A finite element simulation scheme which allows the efficient calculation of electrostatic transducers immersed in an acoustic fluid is presented. This calculation scheme has been applied in investigations of the dynamical behavior of surface micromachined capacitive ultrasound arrays. In order to improve dynamics and efficiency of such transducers a controller has been designed and tested. Therewith, ring down time and acoustic crosstalk in the array are reduced.

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来源期刊

1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)

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