{"title":"电子束和镓离子辐照下光刻图案Co/Pd纳米结构的磁性能","authors":"E. Suharyadi, T. Kato, S. Tsunashima, S. Iwata","doi":"10.1109/INTMAG.2006.374978","DOIUrl":null,"url":null,"abstract":"In this report, patterning Co/Pd continuous magnetic film with perpendicular magnetic anisotropy without significant modifications of the surface roughness of the magnetic films using e-beam lithography followed by Ga ion irradiation has been investigated, as a new approach to realize a thermally stable magnetic storage. Their magnetic properties are also discussed in detail. For comparison, discretely patterned Co/Pd film obtained by e-beam lithography followed by etching process is also studied. From M-H loops, the sample shows in-plane anisotropy. Also, from magnetic force microscopy (MFM) image and M-H loops of ion-irradiation-patterned Co/Pd films, the exchange coupling between bits is considered to exist through in-plane magnetized space region.","PeriodicalId":262607,"journal":{"name":"INTERMAG 2006 - IEEE International Magnetics Conference","volume":"422 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Magnetic Properties of Lithographically Patterned Co/Pd Nanostructures Obtained by E-Beam and Ga Ion Irradiation\",\"authors\":\"E. Suharyadi, T. Kato, S. Tsunashima, S. Iwata\",\"doi\":\"10.1109/INTMAG.2006.374978\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this report, patterning Co/Pd continuous magnetic film with perpendicular magnetic anisotropy without significant modifications of the surface roughness of the magnetic films using e-beam lithography followed by Ga ion irradiation has been investigated, as a new approach to realize a thermally stable magnetic storage. Their magnetic properties are also discussed in detail. For comparison, discretely patterned Co/Pd film obtained by e-beam lithography followed by etching process is also studied. From M-H loops, the sample shows in-plane anisotropy. Also, from magnetic force microscopy (MFM) image and M-H loops of ion-irradiation-patterned Co/Pd films, the exchange coupling between bits is considered to exist through in-plane magnetized space region.\",\"PeriodicalId\":262607,\"journal\":{\"name\":\"INTERMAG 2006 - IEEE International Magnetics Conference\",\"volume\":\"422 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"INTERMAG 2006 - IEEE International Magnetics Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INTMAG.2006.374978\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"INTERMAG 2006 - IEEE International Magnetics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INTMAG.2006.374978","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Magnetic Properties of Lithographically Patterned Co/Pd Nanostructures Obtained by E-Beam and Ga Ion Irradiation
In this report, patterning Co/Pd continuous magnetic film with perpendicular magnetic anisotropy without significant modifications of the surface roughness of the magnetic films using e-beam lithography followed by Ga ion irradiation has been investigated, as a new approach to realize a thermally stable magnetic storage. Their magnetic properties are also discussed in detail. For comparison, discretely patterned Co/Pd film obtained by e-beam lithography followed by etching process is also studied. From M-H loops, the sample shows in-plane anisotropy. Also, from magnetic force microscopy (MFM) image and M-H loops of ion-irradiation-patterned Co/Pd films, the exchange coupling between bits is considered to exist through in-plane magnetized space region.
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