裸铜用低温烧结纳米银贴片材料的研制

K. Sasaki, N. Mizumura, A. Tsuno, Sedat Yagci, Gerhard Kopp
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引用次数: 2

摘要

本文介绍了利用MO(金属有机)技术,以独特的方法新开发的纳米银模贴附体的基础研究。MO技术提供了低温烧结的能力。该纳米银膏体在固化过程中具有较高的热学性能和与金属化模具和基体的强附着力。此外,还开发了树脂增强技术和降低模量技术来改善材料的力学性能。通过在浆料中加入特殊的环氧树脂,使多孔区域被树脂填充,增强烧结结构。此外,热塑性树脂颗粒可以更好地提高可靠性。通过将树脂颗粒添加到浆料中,可以降低模量,并且树脂减少了由模具和基板之间的CTE不匹配引起的应力。然而,由于纳米银粒子和镀银或镀金之间的金属结合很容易形成,因此浆料只能应用于镀银或镀金的基板上。为了满足不镀银、不镀金的应用需求,新开发了裸铜用纳米银模贴附膏。添加一种特殊的添加剂可以有效地在纳米银颗粒和裸铜衬底之间形成金属键合,因为添加剂可以去除铜衬底表面的氧化层。通过调节环氧树脂和热塑性树脂的用量,可以进一步提高裸铜基板的附着强度。本文还将对其机理的基础研究和可靠性试验结果进行讨论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of low-temperature sintering nano-silver die attach materials for bare Cu application
This paper will discuss the fundamental study on nano-silver die attach pastes newly developed with a unique approach using MO (Metallo-organic) technology. MO technology provides a low-temperature sintering capability. The nano-silver pastes show high thermal performance and strong adhesion to the metalized die and substrate without pressure during cure process. In addition, resin reinforcing technology and lowering modulus technology have been developed to improve the mechanical properties. By adding special epoxy resins to the pastes, the porous area is filled with the resin and the sintered structure is reinforced. Additionally, the reliability can be more improved by thermoplastic resin particles. By adding the resin particles to the pastes, the modulus can be lowered and the resin reduces the stress caused by the CTE mismatch between the die and substrate. However, the pastes can only be applied on substrates with Ag or Au plating because the metallic bonding forms without difficulty between the nano-silver particles and the Ag or Au plating. To meet the demand for applications without Ag or Au plating, nano-silver die attach pastes for bare Cu application have newly been developed. Addition of a special additive is effective to form metallic bonding between the nano-silver particles and bare Cu substrates because the additive removes the oxide layer on the surface of Cu substrates. By adjusting the amount of epoxy and thermoplastic resin, adhesion strength on the bare Cu substrate can be more improved. The fundamental investigation for the mechanism and the reliability test results will also be discussed in this study.
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