纳米颗粒与气敏器件CMOS四仪器放大器的接口

Tanu, M. Rizkalla, J. Ryu, Vinay Kumar Suryadevara, Jacquelyn Tschudy
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引用次数: 1

摘要

在这项研究中,我们展示了一种低噪声性能气体传感系统的新方法,该系统能够最大限度地减少四个仪表放大器之间的串扰。这些放大器将从使用单层石墨烯片的四种不同纳米粒子组件中接收气敏信息。通过在放大器周围使用保护环,使串扰最小化。保护环作为虚拟集电极,用于穿过四元仪表放大器(SOC)内寄生BJT器件的少数载流子。本研究旨在确定气敏特征阵列(GSSA),包括气体类型、浓度和动态性能(上升和下降时间)。开发的设备是基于检测石墨烯暴露于各种气体时电特性的变化。本文介绍了一个长期项目的第一阶段,详细介绍了硬件和电路仿真软件的设计,以及它的实际实现,从而得到了基于GSSA数据的最佳气体传感系统。实际模型基于CVD工艺在硅衬底硅片的SiO2层上沉积单层石墨烯薄膜。采用溅射法制备金电极。然后用100%和5%浓度的二氧化碳气体测试该装置,以估计其灵敏度。当二氧化碳浓度为100%时,电阻变化高达48%,当二氧化碳浓度为5%时,电阻变化接近4%,这种变化水平可以通过四芯CMOS仪器芯片轻松监测。通过电路仿真,计算出仪器放大器的增益为83dB。Quad仪器放大器是使用MOSIS服务开发的,衰减低至90dB。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Interfacing nanoparticles to CMOS quad instrumentation amplifiers for gas sensing devices
In this study, we demonstrated a novel approach of a low noise performance gas sensory system, which is capable of minimizing the cross talk between four instrumentation amplifiers. These amplifiers will receive gas sensing information from four different nanoparticle assemblies using monolayer Graphene sheets. The cross talk was minimized by using guard rings surrounding the amplifiers. Guard rings serve as dummy collectors for the minority carriers crossing the parasitic BJT devices within the quad instrumentation amplifier System on chip (SOC). This study aims determination of the gas sensing signature array (GSSA), including the type of gas, its concentration, and dynamic performance (rise and fall times). The developed devices were based on the detection of the change in the graphene electrical characteristics when exposed to various gases. The paper presents the first phase of a long-term project, detailing hardware and circuit simulation software design, and its practical implementation, leading to the optimum gas sensing system resulting from the GSSA data. The practical model was based on monolayer graphene films deposited using CVD process on top of SiO2 layers of silicon substrate wafers. Gold electrodes were deposited with sputtering process. The device was then tested with CO2 gas with 100% and 5% concentrations to estimate its sensitivity. As high as 48% change in resistance was detected from 100% CO2 concentration, and near 4% change in response to 5% CO2 concentration, a level of change that can be easily monitored by the quad CMOS instrumentation chip. A gain of 83dB for the instrumentation amplifier was calculated from the circuit simulation. The Quad instrumentation amplifiers were developed using MOSIS service and showed as low attenuation as 90dB.
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