WO3厚膜和薄膜气敏研究

2011 Fifth International Conference on Sensing Technology Pub Date : 2011-11-01 DOI:10.1109/ICSENST.2011.6136983

K. Thakur, G. Jain

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引用次数: 1

摘要

采用丝网印刷技术和喷雾热解法制备了氧化钨(WO3)厚膜和薄膜。对两种膜在不同温度下对不同气体的气敏性能进行了测试，结果具有相关性。WO3厚膜在3500C时对H2S的响应较好(S=191.31)，而WO3薄膜在3500C、400ppm时响应较差(S=6.48)。测试了传感器的气体响应、选择性和热稳定性

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Gas sensing studies of thick and thin films of WO3

Screen-printing technique and spray pyrolysis method were used to prepare thick and thin films of WO3 (Tungsten Oxide). The gas sensing performance of the both films were tested for various gases at different temperatures and results are correlated. The WO3 thick film showed good response (S=191.31) to H2S at 3500C and WO3 thin film showed poor response (S=6.48) at 3500C for 400 ppm. The gas response, selectivity and thermal stability of the sensor were measured and presented

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2011 Fifth International Conference on Sensing Technology

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