K. Oya, T. Nakazawa, S. Kittaka, K. Tsunetomo, K. Kintaka, J. Nishii, Kazuyuki Hirao
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引用次数: 1
摘要
采用等离子体增强化学气相沉积的方法,在具有高一阶透射衍射效率的二元光栅表面覆盖一层不填充沟槽的SiO 2薄膜。在波长为1.55µm的横电偏振光(TE)和横磁偏振光(TM)中,当周期为1.5µm和深度为2.8µm时,衍射效率约为90%。该光栅用于集成光谱芯片。在5.1 x 9.2 mm²的二氧化硅衬底上制备了一个间距为20 nm的四通道解复用器,其中集成了埋地光栅、一对抛物面镜和通道波导。数值计算证实,当光栅的输入和输出面相对于光栅矢量倾斜时,光栅的角色散会急剧增加,这应该是减小器件尺寸的有效方法。
Fabrication of One-Dimensional Photonic Crystal with Large Dispersion in SiO₂ Glass Substrate Using Deep Dry Etching Technique
Binary gratings with high first-order transmission diffraction efficiency were covered with a thin SiO₂ film without the filling in the grooves by plasma enhanced chemical vapor deposition. The diffraction efficiencies of about 90% were attained for transverse-electric (TE) and transverse-magnetic (TM) polarized lights at a wavelength of 1.55 µm when the period and depth were 1.5 and 2.8 µm, respectively. The grating was used for the integrated spectrographic chip. A four-channel demultiplexer with 20-nm spacing was fabricated on a silica substrate of 5.1 x 9.2 mm², in which a buried grating, a pair of parabolic mirrors and channel waveguides were integrated. It was confirmed by the numerical calculation that the angular dispersion of the grating was increased drastically if the input and output surfaces were tilted against its grating vector, which should be effective to minimize the device size.