氧化铜负载ZnO厚膜电阻器的LPG气敏性能

M. K. Deore, G. Jain, Vinita Gaikwad
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引用次数: 7

摘要

采用丝网印刷技术制备纯ZnO和负载cuo的ZnO厚膜,研究其气敏性能。在不同浓度(1 at)下加载纯AR级氯化铜粉末。wt. %, 3 At。wt. %, 5 At。wt. %和7At.wt. %%)制成纯AR级氧化锌粉末。将不同成分的粉末在1000℃下加热12小时。氯化铜受热后变成氧化铜。将不同成分的薄膜在550℃下焙烧30 min,研究了薄膜的电学、结构和形态特性。纯膜和负载膜的x射线衍射分析显示了多晶性质。利用扫描电镜对膜的表面形貌进行了研究。通过EDAX分析确定各膜的最终成分。测量并给出了传感器的气体响应、选择性、响应和恢复时间。测试了在不同工作温度下对各种气体的传感性能。负载5at的ZnO传感器。wt. %的CuO对LPG气体的响应比纯ZnO和其他负载浓度高,且响应和恢复时间快。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
LPG gas sensing properties of CuO loaded ZnO thick film resistors
A gas sensing performance of pure and CuO-loaded ZnO thick films was studied by preparing thick films using the screen printing technique. The pure AR grade powder of the Copper Chloride was loaded at the various concentrations (1 At. wt. %, 3 At. wt. %, 5 At. wt. % and 7At.wt. %) into the pure AR grade powder of the Zinc oxide. The powders of different compositions were heated at 1000 °C for 12 hrs. The copper chloride transforms into copper oxide upon heating. These films of different compositions were fired at 550 °C for 30 min. The electrical, structural and morphological properties of the films were investigated. The X-ray diffraction analysis of pure and loaded films shows the polycrystalline nature. The surface morphology of the films was studied by SEM. The final composition of each film was determined by EDAX analysis. The gas response, selectivity, response and recovery time of the sensor were measured and presented. The sensing performance was tested for various gases at different operating temperatures. The ZnO sensor loaded with 5 At. wt. % of CuO is found to be high gas response to LPG gas than pure ZnO and other loading concentrations with fast response and recovery time.
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