蒸发的Al/AlF3双层薄膜在327k烤箱中储存超过2500小时没有退化

Kenan Fronk, D. Allred
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引用次数: 0

摘要

在干燥(露点276K)、327k空气中,用一层(29±2 nm)氟化铝(AlF3)薄涂层保护4个蒸发的铝薄膜样品,在2500小时的时间里,用可变角度的光谱椭偏仪观察到,AlF3保护层的厚度没有显著变化,氧化铝的生长也没有明显变化。两个样品在T>200°C时AlF3蒸发,两个样品没有衬底加热。样品之间的老化没有差别。由于在制造和发射完成的天文台之间可能需要许多个月的时间,这一结果有助于理解温度和湿度的界限,将含氟光学元件的可忽略不计的变化与不可接受的退化分开。虽然观察到的厚度变化可以忽略不计,但椭偏数据,psi和delta随时间而变化。在这项研究中,我们还提出了我们使用有效的介质近似模型来理解氟层随老化的变化。观察到的SE参数的变化在这里被解释为孔隙分数的变化,尽管不排除存在一些水。在2500小时结束时,表观孔隙率下降了两倍。孔隙率的减小表明薄膜可能随着时间的推移而变得更加致密。需要其他表面敏感技术,如原子力显微镜,来缩小对观察到的变化的可能解释。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Evidence that evaporated Al/AlF3 bilayer thin films stored in a 327 K oven for over 2500 hours have not degraded
Four evaporated, thin-film Al samples protected by a thin (29±2 nm) aluminum fluoride (AlF3) overcoat stored in dry (dew point 276K ), 327 K air over a period of 2500 hours exhibited no significant changes in the thickness of the protective AlF3 layer nor growth in aluminum oxide as observed by variable-angled, spectroscopic ellipsometry. Two of the samples had AlF3 evaporated at T>200°C, two without substrate heating. No difference in aging was noted amongst the samples. Since many months may elapse between fabrication and launch of the completed observatory, this result contributes to understanding the boundaries in temperature and humidity separating negligible changes in fluoride-containing optical components from unacceptable degradation. While negligible changes in thicknesses were observed, there were changes in the ellipsometric data, psi and delta, with time. In this study, we also present our use of an effective medium approximation model in understanding changes in the fluoride layer with aging. The observed changes in SE parameters are here interpreted as changes in void fraction, though the presence of some water was not ruled out. Apparent void fraction fell by a factor of two by the end of the 2500 hours. The decreasing void fraction suggests that the films might be becoming more compact with time. Other surface sensitive techniques such as AFM are needed to narrow down possible explanations for observed changes.
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