Scanning Acoustic Microscopy in Electronics Research

Abstmt-Some recent work on imaging using a 900 MHz scanning acoustic microscope is described. Examples are given of applications in microelectronics, on semiconductor devices and materials, and on other research topics. The practical problems of material-topography ambiguity are discussed in relation to V(z) curves, and fringe patterns parallel to surface discontinuities are considered. An assessment is presented of the likely future requirements for acoustic microscopy in electronics research, with reference to operating frequency, lenses, and future electronic developments.