高精度干涉测量的图像采集

G. Campbell, G. Sommargren, B. Truax
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引用次数: 0

摘要

在相移干涉测量中,由于整体测量精度通常受到参考波质量的限制,图像采集电子在很大程度上被忽略了。最近开发的一种干涉仪,相移衍射干涉仪[1]提供了高质量的参考波,测量结果优于λ/8000 rms。有了这样一个参考波,干涉仪的精度就会受到图像采集电子系统误差的限制。本文介绍了在使用商业干涉仪中常用的那种图像采集电子器件时出现的各种问题。描述了一种隔离电子问题的基本光纤干涉仪,以及一些误差的简单解决方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Image Acquisition for High Accuracy Interferometry
In phase shifting interferometry, the image acquisition electronics have largely been ignored, because the overall measurement accuracy has generally been limited by the quality of the reference wave. A recently developed interferometer, the phase shifting diffraction interferometer,[1] provides a high quality reference wave, which has been measured to be better than λ/8000 rms. With such a reference wave, the interferometer accuracy then becomes limited by systematic errors in the image acquisition electronics. This paper presents a variety of issues that arise when using image acquisition electronics of the sort commonly used in commercial interferometers. A basic fiber interferometer that isolates electronics issues is described, as are simple solutions to some of the errors.
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