三维多子带集成蒙特卡罗模拟finfet和纳米线晶体管

2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) Pub Date : 2014-10-23 DOI:10.1109/SISPAD.2014.6931553

C. Sampedro, L. Donetti, F. Gámiz, A. Godoy, F. J. García-Ruiz, V. Georgiev, S. Amoroso, C. Riddet, E. Towie, A. Asenov

{"title":"三维多子带集成蒙特卡罗模拟finfet和纳米线晶体管","authors":"C. Sampedro, L. Donetti, F. Gámiz, A. Godoy, F. J. García-Ruiz, V. Georgiev, S. Amoroso, C. Riddet, E. Towie, A. Asenov","doi":"10.1109/SISPAD.2014.6931553","DOIUrl":null,"url":null,"abstract":"In this paper we present the development of a 3D Multi Subband Ensemble Monte Carlo (3DMSB-EMC) tool targeting the simulation of nanoscaled FinFETs and nanowire transistors. In order to deliver computational efficiency, we have developed a self-consistent framework that couples a MSB-EMC transport engine for a 1D electron gas with a 3DPoisson-2DSchrödinger solver. Here we use a FinFET with a physical channel length of 15nm as an example to demonstrate the applicability and highlight the benefits of the simulation framework. A comparison of the 3DMSB-EMC with Non-Equilibrium Green's Functions (NEGFs) in the ballistic limit is used to verify and validate our approach.","PeriodicalId":101858,"journal":{"name":"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"133 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":"{\"title\":\"3D multi-subband ensemble Monte Carlo simulator of FinFETs and nanowire transistors\",\"authors\":\"C. Sampedro, L. Donetti, F. Gámiz, A. Godoy, F. J. García-Ruiz, V. Georgiev, S. Amoroso, C. Riddet, E. Towie, A. Asenov\",\"doi\":\"10.1109/SISPAD.2014.6931553\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper we present the development of a 3D Multi Subband Ensemble Monte Carlo (3DMSB-EMC) tool targeting the simulation of nanoscaled FinFETs and nanowire transistors. In order to deliver computational efficiency, we have developed a self-consistent framework that couples a MSB-EMC transport engine for a 1D electron gas with a 3DPoisson-2DSchrödinger solver. Here we use a FinFET with a physical channel length of 15nm as an example to demonstrate the applicability and highlight the benefits of the simulation framework. A comparison of the 3DMSB-EMC with Non-Equilibrium Green's Functions (NEGFs) in the ballistic limit is used to verify and validate our approach.\",\"PeriodicalId\":101858,\"journal\":{\"name\":\"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)\",\"volume\":\"133 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-10-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"13\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SISPAD.2014.6931553\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SISPAD.2014.6931553","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 13

摘要

在本文中，我们提出了一个三维多子带集成蒙特卡罗(3DMSB-EMC)工具的开发，目标是模拟纳米级finfet和纳米线晶体管。为了提高计算效率，我们开发了一个自一致的框架，将用于一维电子气体的MSB-EMC传输引擎与3DPoisson-2DSchrödinger求解器耦合在一起。在这里，我们使用一个物理通道长度为15nm的FinFET作为示例来演示该仿真框架的适用性并突出其优点。用3DMSB-EMC与非平衡格林函数(negf)在弹道极限下的比较验证了我们的方法。

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3D multi-subband ensemble Monte Carlo simulator of FinFETs and nanowire transistors

In this paper we present the development of a 3D Multi Subband Ensemble Monte Carlo (3DMSB-EMC) tool targeting the simulation of nanoscaled FinFETs and nanowire transistors. In order to deliver computational efficiency, we have developed a self-consistent framework that couples a MSB-EMC transport engine for a 1D electron gas with a 3DPoisson-2DSchrödinger solver. Here we use a FinFET with a physical channel length of 15nm as an example to demonstrate the applicability and highlight the benefits of the simulation framework. A comparison of the 3DMSB-EMC with Non-Equilibrium Green's Functions (NEGFs) in the ballistic limit is used to verify and validate our approach.

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2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)

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