一种获得随机空洞PDMS铁驻极体的新方法

2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2021-12-06 DOI:10.1109/PowerMEMS54003.2021.9658404

Mingming Zhang, Junjie Shi, S. Beeby

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引用次数: 1

摘要

以往关于聚二甲基硅氧烷(PDMS)铁驻极体的研究大多是通过控制空腔布局而不是随机空腔来制备的。本文介绍了一种利用液态聚二甲基硅氧烷(PDMS)与固化剂反应产生的气泡制备具有随机空隙的聚二甲基硅氧烷铁驻极体的新方法。通过建立数学模型来探讨结构与压电之间的关系。介绍了制造工艺，并进行了相关试验。该PDMS铁驻极体的压电系数d33约为206 pC/N。在300N的力作用下，PDMS铁驻极体测得的最大峰值电压约为4v。

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A new approach for obtaining PDMS ferroelectrets with random voids

Most previous work regarding to Polydimethylsiloxane (PDMS) ferroelectret was fabricated with controlled void layouts rather than the random voids. This paper illustrates a new way for obtaining Polydimethylsiloxane (PDMS) ferroelectret with random voids by using the bubbles created by reaction between liquid PDMS and curing agent. A mathematic model is illustrated to explore the connection between structure and piezoelectricity. The fabricating process is present and related test is measured. The piezoelectric coefficient d33 of this PDMS ferroelectret is about 206 pC/N. The maximal peak voltages measured for this PDMS ferroelectret was about 4 V under the force of 300N.

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2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)

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