倾斜传感器技术研究

Qiushi Han, Chen Chen
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引用次数: 12

摘要

本文对各种倾斜度传感器的原理和技术进行了总结和分类,介绍了固体摆倾斜度传感器、液体摆倾斜度传感器、气体摆倾斜度传感器、微机电系统(MEMS)倾斜度传感器、复合倾斜度传感器,包括课程组研制的气体摆双轴倾斜度传感器、微机械气体摆双轴倾斜度传感器、抑制加速度干扰的微机械气摆双轴倾斜传感器等;分析了各种倾角传感器的原理、基本原理、结构及优缺点;通过大量的材料分析和技术研究,指出了发展方向和趋势。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Research on Tilt Sensor Technology
This paper summarizes and classifies the theory and technology of various tilt sensors, introduces solid pendulum tilt sensors, liquid pendulum tilt sensors, gas pendulum tilt sensors, micro-electro-mechanical system (MEMS) tilt sensors, compounding tilt sensors, including several kinds of sensors developed by the research group, such as gas pendulum dual-axis tilt sensors, micro-machined gas pendulum dual-axis tilt sensors, micro-machined gas pendulum dual-axis tilt sensors restraining acceleration interference and so on; analyzes the theory, fundamental, configuration and advantages and disadvantages of all kinds of tilt sensors; points out the development directions and trends according to a great deal of materials analyzing and technology research.
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