纳米晶激光烧蚀厚膜阵列气体传感器的研制

M. Abadi, M. Hamidon, A. Shaari, N. Abdullah, R. Wagiran, N. Misron
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引用次数: 1

摘要

在氧化铝基板上设计并制作了一种多层厚膜阵列气敏传感器,包括加热元件、绝缘层和交叉电极。二氧化锡纳米粉和铂纳米粉以球团形式分别作为活性层和催化剂层。采用脉冲激光烧蚀沉积(PLAD)技术将敏感层沉积到每个传感器的电极部分。测定了传感器表面的微观结构和形态特性。将传感器暴露在木材烟雾中,测量其灵敏度,并与没有催化剂层的传感器结果进行比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of nanocrystalline laser ablated thick film array gas sensor
A multi–layer thick film array sensor for gas sensing application including heater element, insulator layer, and interdigitated electrodes was designed and fabricated on alumina substrate. Tin dioxide and platinum nanopowder were used in the pellet form as the active and catalyst layers, respectively. Pulse laser ablation deposition (PLAD) technique was used to deposit the sensitive layer onto the electrode part of each sensor. Microstructural and morphological properties of the sensor surface were determined. Sensors were exposed to wood smoke and their sensitivity were measured and compared with the results of the sensors without catalyst layer.
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