L. Fan, S. Gloeckner, P. D. Dobblelaere, S. Patra, Daniel J. Reiley, C. King, T. Yeh, J. Gritters, S. Gutierrez, Y. Loke, M. Harburn, Richard T. Chen, E. Kruglick, Ming C. Wu, A. Husain
{"title":"用于平面光子交联的数字MEMS开关","authors":"L. Fan, S. Gloeckner, P. D. Dobblelaere, S. Patra, Daniel J. Reiley, C. King, T. Yeh, J. Gritters, S. Gutierrez, Y. Loke, M. Harburn, Richard T. Chen, E. Kruglick, Ming C. Wu, A. Husain","doi":"10.1109/OFC.2002.1036227","DOIUrl":null,"url":null,"abstract":"In conclusion we have demonstrated fully nonblocking 16/spl times/16 switches in a single chip solution using MEMS fabricated by a surface micro-machining. We have shown how the critical mechanical elements of the MEMS-cell have been chosen to achieve large mechanical movement, high angular repeatability of the movement, and high reliability of the actuation mechanism, which translated into low loss and high reliability of the packaged component. Test results for these components have been presented.","PeriodicalId":347952,"journal":{"name":"Optical Fiber Communication Conference and Exhibit","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"34","resultStr":"{\"title\":\"Digital MEMS switch for planar photonic crossconnects\",\"authors\":\"L. Fan, S. Gloeckner, P. D. Dobblelaere, S. Patra, Daniel J. Reiley, C. King, T. Yeh, J. Gritters, S. Gutierrez, Y. Loke, M. Harburn, Richard T. Chen, E. Kruglick, Ming C. Wu, A. Husain\",\"doi\":\"10.1109/OFC.2002.1036227\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In conclusion we have demonstrated fully nonblocking 16/spl times/16 switches in a single chip solution using MEMS fabricated by a surface micro-machining. We have shown how the critical mechanical elements of the MEMS-cell have been chosen to achieve large mechanical movement, high angular repeatability of the movement, and high reliability of the actuation mechanism, which translated into low loss and high reliability of the packaged component. Test results for these components have been presented.\",\"PeriodicalId\":347952,\"journal\":{\"name\":\"Optical Fiber Communication Conference and Exhibit\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-03-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"34\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Fiber Communication Conference and Exhibit\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OFC.2002.1036227\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Fiber Communication Conference and Exhibit","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OFC.2002.1036227","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Digital MEMS switch for planar photonic crossconnects
In conclusion we have demonstrated fully nonblocking 16/spl times/16 switches in a single chip solution using MEMS fabricated by a surface micro-machining. We have shown how the critical mechanical elements of the MEMS-cell have been chosen to achieve large mechanical movement, high angular repeatability of the movement, and high reliability of the actuation mechanism, which translated into low loss and high reliability of the packaged component. Test results for these components have been presented.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
