杂化铌酸锂电光调制器的设计与制造

2022 IEEE International Conference on Emerging Electronics (ICEE) Pub Date : 2022-12-11 DOI:10.1109/ICEE56203.2022.10117674

V. Mere, Forrest Valdez, S. Mookherjea

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引用次数: 0

摘要

介绍了一种设计和制造混合铌酸锂马赫-曾德电光调制器的方法。该设计使用未蚀刻的铌酸锂薄膜连接到含有平面化氮化硅波导的代工厂制造芯片上。在1310 nm波长下，我们证明了3 db的电光带宽大于110 GHz， $\ mathm {V}\pi \ mathm {L}$为2.4 V.cm。

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Design and Fabrication of Hybrid Lithium Niobate Electro-Optic Modulators

A process for designing and fabricating hybrid lithium niobate Mach-Zehnder electro-optic modulators is described. The design uses unetched thin-film lithium niobate bonded to a foundry-fabricated chip containing planarized silicon nitride waveguides. We demonstrate 3-dB electro-optic bandwidth greater than 110 GHz and $\mathrm{V}\pi \mathrm{L}$ of 2.4 V.cm, at 1310 nm wavelength.

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2022 IEEE International Conference on Emerging Electronics (ICEE)

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