Analysis of Vibration Characteristics of Rolling Linear Guides

The motion accuracy of the system is directly affected by the vibration characteristics of the components. In this paper, the ball linear guides for high-precision mobile platforms for chip inspection equipment are taken as research objects, and their vibration characteristics are analyzed. Based on the theoretical analysis of the contact characteristics of the contact pair based on HertZ theory, the finite element analysis software was used to analyze the modal of the ball linear guide. Among them, the change of normal contact stiffness has a greater impact on the system modal. The material and structural characteristics of the contact pair are the main factors affecting the natural frequency of the system. The magnitudes of each mode and the first six natural frequencies are given. Based on Newtonian mechanics, a mathematical model of the collision between the ball and the returner is established, and the influence of the structural parameters on the collision force is analyzed. The impact of the turning radius on the impact force is negligible, and the initial relative speed, ball mass, and elastic modulus have a greater impact on the impact force. For the ball linear guide rails studied in this paper, the impact force of the ball on the system during the movement is less than 40N, and the vibration shock frequency is less than 7.5Hz. It lays the foundation for the follow-up compensation of the collision force by using the motor feedforward control method, and improves the system's motion accuracy and positioning accuracy.