Daniel Dominguez, L. Hackett, Micheal J. Miller, Jennifer Restrepo, Katya M. Casper, M. Eichenfield
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Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer With Fiber Optical Interconnects
We present the design, fabrication, and initial characterization of a CMOS compatible, ultra-high bandwidth, bulk-micro machined, optomechanical accelerometer. Displacement detection is achieved via a SiN integrated photonics Mach-Zehnder interferometer (MZI) fabricated on the surface of the device that is optomechanically coupled to acceleration-induced deformation of the accelerometer's proof mass tethers. The device is designed to measure vibrations at microsecond timescales with high dynamic range for the characterization of shock dynamics.
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