Research on optimization technology of high precision milling equipment for planar optical elements

Under the background of high precision machining requirements for planar optical elements, the overall structure design of four-axis special milling equipment was made, and the basic materials of equipment components were set. The precision distribution of the moving parts of the equipment is carried out for the traction of the plane optical element with high precision and high efficiency machining, so the equipment model is designed. The static simulation analysis was carried out in the two limit states of the equipment model, the basic design model and the optimal design model were compared. In the intermediate processing state, the deformation of the processing point and the driving part of the basic design model was optimized from 0.298 micron and 0.20 micron to 0.172 micron and 0.155 micron of the optimal design model respectively. The deformation of the processing point and the transmission part of the basic design model was optimized from 0.301 micron and 0.197 micron to 0.197 micron and 0.201 micron of the optimal design model, respectively.