球形离子源的设计与制造

M. M. Abdel Rahman, F. Abdelsalam
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引用次数: 3

摘要

我们报告了一个基于辉光放电的非常简单的离子源,其中阴极下降用于加速离子;因此,施加的电压具有等离子体产生和离子提取的目的,这使得结构和操作非常简单。研究了球形离子源在不同实验条件下的放电特性和离子束特性。离子束电流和气体流过一个直径较小的孔,该孔产生一个机械约束,将离子束聚焦在法拉第杯下游3厘米的距离上。以氮气为排放气体进行了实验。在阳极和阴极之间放置不同直径(5,10,15,20,30和38mm)的胶木绝缘子盘。该圆盘覆盖阴极区域,减少阴极表面的放电面积,实现放电约束;因此,可以获得更高的输出离子束电流。最佳工作条件为放电压力在10 ~ 4mbar范围内,阴极和阳极之间的间隙距离为3mm(绝缘子厚度),绝缘子孔直径(胶木绝缘子)为5mm。当氮气压力为5 ×10−4 mbar,放电电流为1 mA时,电木材料的最佳绝缘子孔直径(5 mm)为230 μA。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design and fabrication of a spherical configuration ion source
We report a very simple ion source based on a glow discharge, where the cathode fall is used to accelerate ions; the applied voltage has therefore the purpose of both plasma generation and ion extraction, which makes construction and operation very simple. Discharge and ion beam characteristics of the spherical configuration ion source are studied at different experimental conditions. The ion beam current and gas flow pass through an orifice of small diameter which causes a mechanical confinement to focus the ion beam on the Faraday cup downstream of a distance of 3 cm. Experiments have been done with nitrogen as discharge gas. A disk of Bakelite insulator with different diameters (5, 10, 15, 20, 30 and 38 mm) has been put between the anode and the cathode. This disk covered the cathode area and reduced the discharge area on the cathode surface for discharge confinement; therefore, a higher output ion beam current could be obtained. The best working conditions were found to be at discharge pressure in the range of 10−4 mbar, gap distance between the cathode and the anode equal to 3 mm (insulator thickness) and orifice of the insulator diameter (Bakelite insulator) equal to 5 mm. Ion beam current of 230 μA was obtained at the optimum insulator orifice diameter of the Bakelite material (5 mm) for a nitrogen gas pressure of 5 ×10−4 mbar and a discharge current of 1 mA.
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