带有镁电子注入器的EPROM电池

1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings Pub Date : 1995-11-06 DOI:10.1109/TENCON.1995.496438

S. O. Kong, C. Kwok, S. Wong

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引用次数: 1

摘要

用Mg作为EPROM电池的穿隧电极，通过与SiO/sub - 2/介电介质发生烧结反应，结果表明:Mg与SiO/sub - 2/介电介质发生烧结反应后，穿隧电流明显增强，而穿隧场明显减小。这可能会导致更快的编程，更低的编程电压和更好的编程耐久性。制作了一个实验EPROM单元，并证明了可编程性。

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An EPROM cell with a magnesium electronic injector

By using Mg as the tunnelling electrode for an EPROM cell, it is shown in a control experiment that the tunnelling current is much enhanced while the tunnelling field is much reduced after a sintering procedure in which Mg reacts with the SiO/sub 2/ dielectric. Potentially, this may lead to faster programming, lower programming voltages and better programming endurance. An experimental EPROM cell has been made and has demonstrated programmability.

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来源期刊

1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings

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