用于光声气体检测的高性能压电晶体Alpha-Bibo

Feifei Chen, F. Yu, W. Bai, Lian Xiong, G. Diebold, Xian Zhao
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引用次数: 4

摘要

光声(PA)效应结合压电效应被设计用于痕量气体检测,有望在较宽的温度范围内工作。本文对无铅压电晶体LiNbO3 (LN)、NdCa4O(BO3)3(NdCOB)和$\alpha-$ BiB3O6(BIBO)进行了潜在PA微量气体检测的研究和比较。对LN $(g21)$、NdCOB $(g12)$和BIBO $(g21)$的压电电压系数进行了表征,室温下的压电电压系数分别为0.026 Vm/N、0.047 Vm/N和0.225 Vm/N。在三种压电晶体中,BIBO晶体的纵向压电系数$d_{22}$最高,压电电压系数$g_{22}$最大,分别为40 pC/N和0.538 Vm $\bullet$ /N。得到了NdCOB和BIBO晶体的压电电压系数具有良好的温度稳定性,在温度范围内保持相近的值,而LN晶体的$g_{21}$值随着温度的升高而降低。利用BIBO晶体压电活性强、机械品质因子Q高的特点,制作了中心共振频率为$\sim$ 443 kHz的压电换能器,用于PA微量气体检测。将痕量六氟化硫(SF6)气体的最终检测限扩展到千万亿分之一的水平。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High Performance Piezoelectric Crystal Alpha-Bibo for Photoacoustic Gas Detection
The photoacoustic (PA) effect combing with the piezoelectric effect has been designed for trace gas detection, which has been expected to be operational over a wide temperature range. In this paper, the lead-free piezoelectric crystals LiNbO3 (LN), NdCa4O(BO3)3(NdCOB) and $\alpha-$BiB3O6(BIBO) are studied and compared for potential PA trace gas detection. The piezoelectric voltage coefficients of LN $(g21)$, NdCOB $(g12)$ and BIBO $(g21)$ were characterized and found to be on the order of 0.026 Vm/N, 0.047 Vm/N and 0.225 Vm/N at room temperature, respectively. Among the three kinds of piezoelectric crystals, the BIBO crystal possesses the highest longitudinal piezoelectric coefficient $d_{22}$ and the largest piezoelectric voltage coefficient $g_{22}$, being on the order of 40 pC/N and 0.538 Vm$\bullet$/N, respectively. The piezoelectric voltage coefficients for NdCOB and BIBO crystal were obtained to show good temperature stability and maintained the similar values over the temperature range, while the value of $g_{21}$ for LN crystal showed a decrease with increasing temperature. Taking advantage of the strong piezoelectric activity and high mechanical quality factor Q of BIBO crystal, piezoelectric transducer with central resonance frequency of $\sim$443 kHz was fabricated for PA trace gas detection. The final detection limit for trace sulfur hexafluoride (SF6) gas was extended to the parts-per-quadrillion level.
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