{"title":"集成薄膜微电位器","authors":"J. Kinard, D. Huang, D. Novotny","doi":"10.1109/CPEM.1994.333347","DOIUrl":null,"url":null,"abstract":"Integrated micropotentiometers, new devices fabricated with thin-film technology and the micromachining of silicon, have been developed for the accurate determination of ac voltage from 1 to 200 mV up to 100 kHz and with the potential for higher frequencies.<<ETX>>","PeriodicalId":388647,"journal":{"name":"Proceedings of Conference on Precision Electromagnetic Measurements Digest","volume":"149 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"Integrated thin-film micropotentiometers\",\"authors\":\"J. Kinard, D. Huang, D. Novotny\",\"doi\":\"10.1109/CPEM.1994.333347\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Integrated micropotentiometers, new devices fabricated with thin-film technology and the micromachining of silicon, have been developed for the accurate determination of ac voltage from 1 to 200 mV up to 100 kHz and with the potential for higher frequencies.<<ETX>>\",\"PeriodicalId\":388647,\"journal\":{\"name\":\"Proceedings of Conference on Precision Electromagnetic Measurements Digest\",\"volume\":\"149 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-06-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of Conference on Precision Electromagnetic Measurements Digest\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CPEM.1994.333347\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of Conference on Precision Electromagnetic Measurements Digest","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CPEM.1994.333347","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Integrated micropotentiometers, new devices fabricated with thin-film technology and the micromachining of silicon, have been developed for the accurate determination of ac voltage from 1 to 200 mV up to 100 kHz and with the potential for higher frequencies.<>
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