515nm,飞秒激光反射薄膜损伤竞赛

Laser Damage Pub Date : 2021-10-12 DOI:10.1117/12.2597206
R. Negres, C. Stolz, G. Batavičiūtė, A. Melninkaitis
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引用次数: 0

摘要

今年的竞赛是2020年薄膜损伤竞赛的延续,该竞赛使用纳秒(ns)激光脉冲进行,旨在调查飞秒(fs)脉冲长度范围内最先进的可见高反射器。对涂层的要求是在532 nm处,在0度入射角下的最低反射率为99.5%。2021年可用于测试的fs激光源提供515 nm的脉冲;因此,为了在同一样品上同时进行ns-和fs-损伤测试,后一种测试以25度的入射角进行,以重新定位涂层的反射光谱带,即从532 nm到515 nm的蓝移。涂层材料、设计和沉积方法的选择留给了参与者。对2020年收到的样品和2021年提交的新样品进行激光损伤测试,在单个测试设施中使用S-on-1标准化测试协议,使用200-fs脉冲长度的激光系统,在单纵向模式下以5 kHz工作。双盲测试保证了样本和提交者的匿名性。他们分享了损伤性能结果(LIDT)、样品排名、沉积过程细节、涂层材料和基材清洁方法。这些实验不仅可以在参与者之间进行直接比较,而且可以在两种不同的脉冲长度制度下进行性能对比。我们发现不同的沉积方法和涂层材料在fs脉冲下产生相当高的激光电阻。也就是说,铪/二氧化硅、铪/氧化铝/二氧化硅或钽/氧化铝/二氧化硅多层涂层在fs激光脉冲下的抗损伤能力最强。相比之下,电子束的铪/二氧化硅涂层被认为是ns脉冲状态下性能最好的涂层。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
515-nm, femtosecond laser mirror thin film damage competition
This year’s competition is a continuation of the 2020 thin film damage competition conducted with nanosecond (ns) laser pulses and aimed to survey state-of-the-art visible high reflectors in the femtosecond (fs) pulse length regime. The requirements for the coatings were a minimum reflection of 99.5% at 0 degrees incidence angle at 532 nm. The fs-laser source available for testing in 2021 delivered pulses at 515 nm; as a result, to accommodate both ns- and fs-damage tests on the same samples, the latter tests were conducted at an incidence angle of 25 degrees to re-center the reflection spectral band of the coatings, i.e., a blue shift from 532 nm to 515 nm. The choice of coating materials, design, and deposition method were left to the participants. Laser damage testing of samples received in 2020 and new sample submissions in 2021 was per- formed at a single testing facility using the S-on-1 standardized test protocol with a 200-fs pulse length laser system operating at 5 kHz in a single-longitudinal mode. A double-blind test assured sample and submitter anonymity. The damage performance results (LIDT), sample rankings, details of the deposition processes, coating materials and substrate cleaning methods are shared. These experiments enabled not only direct comparison among the participants but also the performance contrast in two different pulse length regimes. We found that different deposition methods and coating materials yield comparably high laser resistance in the fs-pulse regime. Namely, hafnia/silica, hafnia/alumina/silica or tantala/alumina/silica multilayer coatings were the most damage resistant under exposure to fs-laser pulses within the coating deposition groups. In contrast, hafnia/silica coatings by e-beam were identified as best performers in the ns-pulse regime.
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