提高对准稳定性的等离子体光束对准液晶[LCD制造]

IEEE International Conference on Mechatronics, 2005. ICM '05. Pub Date : 2005-07-10 DOI:10.1109/ICMECH.2005.1529386

P. Liu, C. Lee, M. Hsiung, C. Lee, O. Yaroshchuk, R. Kravchuk

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引用次数: 0

摘要

描述了一种提供液晶(LC)对准基板的等离子束处理方法，该方法提高了对准稳定性。在该方法中，对准基板同时用含有对准剂和钝化剂的等离子体通量进行斜向处理。本方法适用于有机和无机来源的基材。在此处理过程中，保证了良好的预倾角稳定性和对准质量。

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Plasma beam alignment of liquid crystal with improved alignment stability [LCD manufacture]

A method of plasma beam treatment providing liquid crystal (LC) aligning substrates of improved alignment stability is described. In this method the aligning substrates are obliquely treated with a plasma flux containing alignment and passivation agents simultaneously. This method is applicable for the substrates of organic and inorganic origin. During this treating process, good pretilt angle stability and alignment quality are much promised.

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来源期刊

IEEE International Conference on Mechatronics, 2005. ICM '05.

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