不同成像光谱下聚合物衍射光栅的平面内旋转调谐

2018 IEEE 8th International Nanoelectronics Conferences (INEC) Pub Date : 1900-01-01 DOI:10.1109/INEC.2018.8441906

Sanathanan S. Muttikulangara, M. Baranski, S. Rehman, Liangxing Hu, J. Miao

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引用次数: 1

摘要

本文讨论了一种基于静电步进电机机构原理的单片旋转驱动器的制作与测试。光学衍射光栅是用负SU-8光刻胶制作的，该光刻胶将嵌入旋转致动器上以进行调谐。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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In-plane Rotational Tuning of Polymer Diffraction Grating for Diverse Imaging Spectroscopy

This paper discusses fabrication and testing of a monolithic rotary actuator that works on the principle of electrostatic stepper motor mechanism. Optical diffraction gratings are fabricated using negative SU-8 photoresist which are to be embedded on the rotary actuator for tuning.

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来源期刊

2018 IEEE 8th International Nanoelectronics Conferences (INEC)

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