嵌入式紧凑型测试结构，带有比较器，可快速测量器件特性

ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095) Pub Date : 2000-03-13 DOI:10.1109/ICMTS.2000.844430

J. Goto, S. Kuwabara, T. Tsujide

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引用次数: 0

摘要

高性能lsi的最新发展需要在工艺开发阶段进行大量昂贵且耗时的器件特性测量。本文介绍了一种新的测试结构来测量器件特性，大大减少了运行时间和芯片面积开销，并展示了将功能测试与器件特性测试统一起来的可能性。

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Embedded compact test structure with a comparator for rapid device characteristic measurement

The recent development of high performance LSIs requires a lot of expensive and time-consuming measurements of device characteristics at the process development stages. This paper introduces a new test structure to measure device characteristics with drastically reduced run-time and chip-area overheads, and also shows the possibility of unifying function tests and device characteristic measurements.

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来源期刊

ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095)

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