在低真空或常压下工作的纳米晶硅弹道发射极的实用性

Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737) Pub Date : 2004-07-11 DOI:10.1109/IVNC.2004.1354992

N. Koshida, A. Kojima, T. Ichihara, T. Komoda

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引用次数: 0

摘要

纳米硅发射极在低真空条件下作为弹道冷阴极，在常压条件下作为负离子源。这种有用性与弹道发射模型是一致的，即高能电子是在通过薄氧化物连接的nc-Si链中产生的。目前的结果表明，该发射器在各种压力和气体环境中的应用具有进一步的潜力。

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Usefulness of nanocrystalline silicon ballistic emitter for operation in either low-vacuum or atmospheric pressure

The nc-Si emitter operates as a ballistic cold cathode in low vacuum and as a negative ion source in atmospheric pressure. This usefulness is consistent with the ballistic emission model that energetic electrons are generated in nc-Si chains interconnected via thin oxides. The present result indicates further potential of this emitter for various applications in a wide range of pressure and gas ambient.

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Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)

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