具有异步激光脉冲检测模式的高清晰度10μm间距InGaAs探测器

R. Fraenkel, E. Berkowicz, L. Bykov, R. Dobromislin, R. Elishkov, A. Giladi, I. Grimberg, I. Hirsh, E. Ilan, C. Jacobson, I. Kogan, P. Kondrashov, I. Nevo, I. Pivnik, S. Vasserman
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引用次数: 9

摘要

近年来,SCD开发了用于短波红外成像的InGaAs/InP技术。第一款产品Cardinal 640采用15μm间距的640x512 (VGA)格式,目前已经交付了1000多台。我们现在展示红衣主教1280,具有目前可用的最小间距(10μm),具有1280x1024 (SXGA)格式。红衣主教1280解决了远程日光成像和被动或主动成像在低光水平(LLL)条件下。读出集成电路支持13位分辨率的快照成像,全格式帧率为160Hz,帧率为640Hz,帧率为2x2帧。它还具有低噪声成像(LNIM)模式,具有35读出噪声和内部相关双采样(CDS)。异步激光脉冲检测(ALPD)模式采用2x2分形与SWIR成像并行(分辨率为10 μm)。新的10 μm像素对可见光(VIS)光谱敏感,在280K时典型暗电流为~ 0.5fA,在1550nm处量子效率>80%。焦平面阵列集成到坚固耐用的高真空完整性金属封装中,具有优化性能的热电冷却器(TEC)和高等级蓝宝石窗口。在本文中,我们将介绍结构和初步测量结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High definition 10μm pitch InGaAs detector with asynchronous laser pulse detection mode
In recent years SCD has developed InGaAs/InP technology for Short-Wave Infrared (SWIR) imaging. The first product, Cardinal 640, has a 640x512 (VGA) format at 15μm pitch, and more than a thousand units have already been delivered. We now present Cardinal 1280, having the smallest pitch available today (10μm), with a 1280x1024 (SXGA) format. Cardinal 1280 addresses both long-range daylight imaging, and passive or active imaging in Low Light Level (LLL) conditions. The Readout Integrated Circuit supports snapshot imaging at 13 bit resolution with a frame rate of 160Hz at full format, or a frame rate of 640Hz with 2x2 binning. It also has a Low Noise Imaging (LNIM) mode with 35ereadout noise with internal Correlated Double Sampling (CDS). An asynchronous Laser Pulse Detection (ALPD) mode is implemented with 2x2 binning in parallel to SWIR imaging (with 10 μm resolution). The new 10 μm pixel is sensitive down to the visible (VIS) spectrum, with a typical dark current of ~ 0.5fA at 280K, and a quantum efficiency >80% at 1550nm. The Focal Plane Array is integrated into a ruggedized, high vacuum integrity, metallic package, with a Thermo- Electric Cooler (TEC) for optimized performance, and a high grade Sapphire window. In this paper we will present the architecture and preliminary measurement results.
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