S. Manikandan, V. R. Prakash, M. Saravanan, P. Diderot
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Design of MEMS Temperature Sensor Using Molybdenum Material for Enhancing Its Performance
In this paper, a design of a Micro Electro Mechanical System (MEMS)based temperature sensor using molybdenum is discussed. The optimization of the shape and dimensions has been done to improve its performance characteristics. The designed MEMS Sensors will have length and width of 6.5mm⨯4mm respectively to provide better results. The optimized design was converted into a device through fabrication and it was tested. Such temperature sensor results in very high accuracy with excellent noise immunity and small in size. A novel COSMOL multiphysics approach has been employed for designing the sensor to enhance its characteristics.
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