{"title":"离子束溅射系统中YbF3和ZnS红外多层涂层的研究","authors":"A. Ribeaud, J. Pistner, H. Hagedorn, S. Joseph","doi":"10.1364/OIC.2019.MC.7","DOIUrl":null,"url":null,"abstract":"Optical and mechanical properties from Infra-Red Anti-Reflective coatings deposited using YbF3 and ZnS as layer materials in an Ion Beam Sputtering system.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Infra-Red Multi-Layer Coatings Using YbF3 and ZnS in an Ion Beam Sputtering System\",\"authors\":\"A. Ribeaud, J. Pistner, H. Hagedorn, S. Joseph\",\"doi\":\"10.1364/OIC.2019.MC.7\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Optical and mechanical properties from Infra-Red Anti-Reflective coatings deposited using YbF3 and ZnS as layer materials in an Ion Beam Sputtering system.\",\"PeriodicalId\":119323,\"journal\":{\"name\":\"Optical Interference Coatings Conference (OIC) 2019\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Interference Coatings Conference (OIC) 2019\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/OIC.2019.MC.7\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.MC.7","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Infra-Red Multi-Layer Coatings Using YbF3 and ZnS in an Ion Beam Sputtering System
Optical and mechanical properties from Infra-Red Anti-Reflective coatings deposited using YbF3 and ZnS as layer materials in an Ion Beam Sputtering system.
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