Synthesis and modeling of influence of precipitation conditions on growth speed, composition and structure of amorphous hydrogenised carbon films

This researh is devoted to evaluation of synthesis condition influence on properties of amorphous hydrogenised carbon (a-C:H) film precipitation processes. Analysis of technological parameters (partial methane pressure PCH4, power of HF radiation W and self-bias Ubias) impact on precipitation speed, composition and structure of a-C:H films is presented in the frame of precipitation and growth of amorphous and crystalline materials model [1]. It is shown that growth speed is proportional to √P(CH4) and fraction of sp2-hybridised carbon is proportional to 1/√P(CH4); increase of methane pressure or decrease of HF radiation power and self-bias yields higher bonded hydrogen concentration.