激光刻划制备AlGaN/ aln基多量子阱

2019 16th China International Forum on Solid State Lighting & 2019 International Forum on Wide Bandgap Semiconductors China (SSLChina: IFWS) Pub Date : 2019-11-01 DOI:10.1109/SSLChinaIFWS49075.2019.9019808

Bin Xue, Jianchang Yan, Yanan Guo, Chunyan Liu, Yiping Zeng, Junxi Wang, Jinmin Li

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引用次数: 0

摘要

我们提出了一种激光辅助的方法来获得在c面蓝宝石上生长的algan基紫外激光结构的光滑的Fabry-Perot腔面。结果表明，激光刻划参数对解理面的形貌有显著影响。通过选择合适的切割方向、切割距离和切割深度，提高了表面的光洁度和均匀性。因此，激光划刻是一种有效的、可控的制备algan基激光器切面的工艺。

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Facet Formation of AlGaN/AlN-based Multiple Quantum Wells by Laser Scribing

We proposed a laser-assisted method to obtain smooth Fabry-Perot cavity facet of AlGaN-based UV laser structure grown on c-plane sapphire. We demonstrated that laser scribing parameters has significant influence on the morphology of the cleavage plane. Smoothness and uniformity of the facet was improved by choosing appropriate cleaving direction, distance and depth. Therefore, laser scribing is an effective and controllable process to fabricate facets of AlGaN-based laser.

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来源期刊

2019 16th China International Forum on Solid State Lighting & 2019 International Forum on Wide Bandgap Semiconductors China (SSLChina: IFWS)

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