液浮式微陀螺仪机电接口模型分析

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI:10.1109/NEMS.2013.6559846

M. Ren, Xiaowei Liu, Wen Zuo, Z. Mao

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引用次数: 0

摘要

提出了一种液浮式微陀螺仪的机电界面模型，该模型可以分析陀螺仪的传感电容和电阻。利用电路仿真软件对其影响进行了分析和仿真。分析结果表明，合理的接口电路可以有效地消除这些寄生电容的影响，提高信噪比。为了保证高分辨率，利用ANSOFT软件对液浮微陀螺仪进行了建模。结果显示了传感器的传递特性和传递特性的非线性误差。

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Analysis of electromechanical interface model for liquid floated micro-gyroscope

This paper presents an electromechancial interface model of liquid floated micro-gyroscope, which can analyze sensing capacitors and resistance of gyroscope. The impacts of them are analyzed and simulated with the simulation software of circuit. The analytic results indicate that the reasonable interface circuit can substantially remove the impacts of these parasitic capacitances, increase the signal noise ratio. To ensure the high resolution, the model of liquid floated micro-gyroscope with ANSOFT conducted. The results show the transfer characteristics of the sensor and nonlinear error of transfer characteristics.

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The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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