{"title":"生化传感微环谐振器的表面灵敏度优化","authors":"F. Dell’Olio, V. Passaro, F. De Leonardis","doi":"10.1109/ICTON.2006.248516","DOIUrl":null,"url":null,"abstract":"A compact optical biosensor based on a microring resonator is proposed in this work. CMOS compatible technology based on silicon nitride deposited by low-pressure chemical vapour deposition (LPCVD) on silicon oxide has been adopted in the design. Surface sensing has been exploited, to be used in a wide range of biochemical applications, such as DNA sequencing by hybridization, antigen-antibody reactions study or pollution concentration measure in water. A semi-analytic approach supported by finite element method has been proposed to estimate and optimize the device sensitivity. Finally sensor functionality has been proved by finite difference time domain approach","PeriodicalId":208725,"journal":{"name":"2006 International Conference on Transparent Optical Networks","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Surface Sensitivity Optimization of a Microring Resonator for Biochemical Sensing\",\"authors\":\"F. Dell’Olio, V. Passaro, F. De Leonardis\",\"doi\":\"10.1109/ICTON.2006.248516\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A compact optical biosensor based on a microring resonator is proposed in this work. CMOS compatible technology based on silicon nitride deposited by low-pressure chemical vapour deposition (LPCVD) on silicon oxide has been adopted in the design. Surface sensing has been exploited, to be used in a wide range of biochemical applications, such as DNA sequencing by hybridization, antigen-antibody reactions study or pollution concentration measure in water. A semi-analytic approach supported by finite element method has been proposed to estimate and optimize the device sensitivity. Finally sensor functionality has been proved by finite difference time domain approach\",\"PeriodicalId\":208725,\"journal\":{\"name\":\"2006 International Conference on Transparent Optical Networks\",\"volume\":\"29 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-06-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 International Conference on Transparent Optical Networks\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICTON.2006.248516\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 International Conference on Transparent Optical Networks","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICTON.2006.248516","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Surface Sensitivity Optimization of a Microring Resonator for Biochemical Sensing
A compact optical biosensor based on a microring resonator is proposed in this work. CMOS compatible technology based on silicon nitride deposited by low-pressure chemical vapour deposition (LPCVD) on silicon oxide has been adopted in the design. Surface sensing has been exploited, to be used in a wide range of biochemical applications, such as DNA sequencing by hybridization, antigen-antibody reactions study or pollution concentration measure in water. A semi-analytic approach supported by finite element method has been proposed to estimate and optimize the device sensitivity. Finally sensor functionality has been proved by finite difference time domain approach
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