扫描电镜中电荷的识别与补偿

Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits Pub Date : 1997-07-21 DOI:10.1109/IPFA.1997.638151

W. Wong, J. Thong, J. Phang

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引用次数: 2

摘要

讨论了扫描电子显微镜(SEM)中常见的电荷伪影。讨论了一种利用前端控制扫描电镜波束电压和扫描来实现充电补偿的新方法。结果表明，该方法不仅有效地降低了高负电荷，而且为静电反射镜实验测量电荷提供了一种手段。

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Charging identification and compensation in the scanning electron microscope

Common charging artifacts in the scanning electron microscope (SEM) are discussed. A novel method employing front-end control of the SEM beam voltage and scanning to achieve charging compensation was also discussed. Results show that the new technique is effective in reducing highly-negative charging as well as providing a means for the experimental measurement of charging using the electrostatic mirror.

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Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits

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