具有589 pm/V波长可调性的电调谐硅微环谐振器

2023 IEEE Silicon Photonics Conference (SiPhotonics) Pub Date : 2023-04-01 DOI:10.1109/SiPhotonics55903.2023.10141968

W. Hsu, N. Nujhat, Benjamin Kupp, J. F. Conley, Alan X. Wang

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引用次数: 0

摘要

我们展示了一种集成高迁移率掺钛氧化铟/氧化铪/硅MOS电容器的电可调谐硅微环谐振器。将微环波导宽度缩小到300 nm，实现了589 pm/V的极高电光波长可调性，高质量系数为5200。

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Electrically Tunable Silicon Microring Resonator with 589 pm/V Wavelength Tunability

We demonstrated an electrically tunable silicon microring resonator integrated with high mobility titanium-doped indium oxide/hafnium oxide/silicon MOS capacitor. Narrowing the microring waveguide width to 300 nm achieved an extremely high electro-optic wavelength tunability of 589 pm/V with a high-quality factor of 5200.

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2023 IEEE Silicon Photonics Conference (SiPhotonics)

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