退火温度变化处理下基于K-M函数的LiTaO3层光学带隙

N. Djohan, N. Sevani, R. Estrada, H. Hardhienata, Irzaman
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引用次数: 1

摘要

采用化学溶液沉积(CSD)技术在p型硅片上制备了LiTaO3材料的薄层。在本研究中,薄膜在温度为75$0^{o}$C, 80$0^{o}$C和85$0^{o}$C的炉(Nabertherm B410)中进行热差退火15小时。利用氘卤素光源(Ocean Optics DH-2000-BAL)和光谱仪(Ocean Optics USB4000-UV-VIS)在230 ~ 850 nm波长范围内测量了与薄膜特性相关的反射率数据。利用K-M (Kubelka-Munk)函数根据反射率数据和光子能量估计光学带隙值。研究结果表明,p型硅片上LiTaO3材料的光学带隙随着温度的升高而发生灵敏度位移。根据与光谱相关的光学带隙值的结果,得出薄膜具有作为紫外和可见光敏感传感器应用的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Optical Band Gap Based on K-M Function on Layer of LiTaO3 with Variation Treatment of Annealing Temperature
The thin layer made from the material of LiTaO3 on a P-type silicon wafer has been produced by using Chemical Solution Deposition (CSD) technique. In this study, the thin films have been annealed with thermal differences in the furnace (Nabertherm B410) for 15 hours at a temperature of 75$0^{o}$C, 80$0^{o}$C, and 85$0^{o}$C. The reflectance data related to the characteristic of thin films have been measured by using deuterium-halogen light sources (Ocean Optics DH-2000-BAL) and spectrometer (Ocean Optics USB4000-UV-VIS) in the wavelength that ranges between 230-850 nm. The K-M (Kubelka-Munk) function is applied to estimate the optical band gap value referred to the reflectance data and photon energy. The result of this study shows that the optical band gap of LiTaO3 material on P-type silicon wafers are having a sensitivity shift in accordance with the increment of temperature. Based on the result of optical band gap values related to light spectrum, it is concluded that the thin films have the potential to be applied as a sensor with sensitivity to the ultraviolet and visible region.
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