新兴纳米技术在未来高速低功耗逻辑应用中的机遇与挑战

R. Chau
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These emerging devices are benchmarked against state-of-the-art Si CMOS technologies in terms ofboth speed and power dissipation. The three fundamental transistor benchmarking metrics utilized in this study are i) intrinsic gate delay versus transistor physical gate length, ii) energy-delay product versus transistor physical gate length, and iii) intrinsic gate-delay versus the on-current/off-state leakage ratio (Ion/loff). While intrinsic device speed and switching energy are emphasized in the first and second metrics respectively, the tradeoff between device speed versus off-state leakage is assessed in the third metric. For high-speed and low-power logic applications, both low gate delay and low energy-delay product, as well as high Ion/loff ratios are required. The current status of these emerging nanoelectronic devices in light of the above metrics will be described in this talk. 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引用次数: 1

摘要

本演讲将重点介绍非硅材料的机遇和挑战,如i)碳纳米管(CNTs), ii)半导体纳米线,iii) Ge和iv)未来高速,低功耗逻辑应用的il - v材料。一般来说,这些材料比Si具有更高的固有迁移率(空穴或电子迁移率),并且它们可以潜在地用来取代Si作为晶体管的沟道材料,以提高速度和降低功耗。在这次演讲中,新兴的纳米电子器件,如半导体-纳米线场效应晶体管(fet)[1,2],碳纳米管场效应管[1-3],Ge mosfet[4],应变Ge量子阱场效应管[4]和III-V化合物半导体量子阱场效应管[4-6],评估了它们在未来高性能,低功耗计算应用中的潜力。这些新兴器件在速度和功耗方面均以最先进的Si CMOS技术为基准。本研究中使用的三个基本晶体管基准指标是i)本征栅极延迟与晶体管物理栅极长度,ii)能量延迟积与晶体管物理栅极长度,以及iii)本征栅极延迟与通流/关流泄漏比(Ion/loff)。虽然在第一个和第二个指标中分别强调了器件固有速度和开关能量,但在第三个指标中评估了器件速度与断开状态泄漏之间的权衡。对于高速和低功耗逻辑应用,需要低栅极延迟和低能量延迟产品,以及高离子/ off比。本讲座将根据上述指标描述这些新兴纳米电子器件的现状。此外,这些设备的优点和缺点,以及物理操作,将被描述。除了上述器件方面,这些新兴纳米技术的材料和集成(在硅上)方面也很重要。这些非硅材料不会取代硅,而是需要集成到硅衬底上。碳纳米管和半导体纳米线都是采用“自下而上”的化学合成方法形成的,目前它们都存在一个基本的放置问题,即没有实用可靠的方法来精确对准和定位它们。另一方面,Ill-V和Ge材料可以使用传统的“自上而下”平版印刷和蚀刻技术制成理想的器件结构。在这方面,iii - v和Ge被认为比碳纳米管和纳米线更适用于未来的高速、低功耗纳米电子器件应用。事实上,Ill-V材料在通信和光电子产品中的应用已经有相当长的时间了。然而,III-V材料要应用于未来的高速、低功耗逻辑应用,仍面临许多重大挑战。这些包括(i)找到与iii - v兼容的栅极介电介质,(ii)证明晶体管栅极长度在35 nm以下具有可接受的离子/关闭比,(iii)提高iii - v中的空穴迁移率或为互补金属氧化物半导体(CMOS)配置找到合适的p沟道场效应管,以及(iv)将il - v材料集成到Si衬底上。虽然这些都是困难的挑战,但最近取得了很大进展[4,6]。如果这些问题确实可以解决,iii - v将与硅一起在未来的逻辑纳米电子学中发挥重要作用。这些挑战,以及潜在的解决方案和最近的进展,将在本次演讲中讨论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Opportunities and Challenges of Emerging Nanotechnologies for Future High-Speed and Low-Power Logic Applications
This presentation will highlight the opportunities and challenges ofnon-Si materials such as i) carbon-nanotubes (CNTs), ii) semiconductor-nanowires, iii) Ge, and iv) Ill-V materials for future high-speed, low-power logic applications. These materials, in general, have significantly higher intrinsic mobility (either hole or electron mobility) than Si, and they can potentially be used to replace Si as the channel material of the transistor to both enhance speed and reduce power. In this talk, emerging nanoelectronic devices such as semiconductor-nanowire field effect transistors (FETs) [1,2], carbon-nanotube FETs [1-3], Ge MOSFETs [4], strained Ge quantum-well FETs [4], and III-V compound semiconductor quantum-well FETs [4-6], are assessed for their potential in future high-performance, low-power computation applications. These emerging devices are benchmarked against state-of-the-art Si CMOS technologies in terms ofboth speed and power dissipation. The three fundamental transistor benchmarking metrics utilized in this study are i) intrinsic gate delay versus transistor physical gate length, ii) energy-delay product versus transistor physical gate length, and iii) intrinsic gate-delay versus the on-current/off-state leakage ratio (Ion/loff). While intrinsic device speed and switching energy are emphasized in the first and second metrics respectively, the tradeoff between device speed versus off-state leakage is assessed in the third metric. For high-speed and low-power logic applications, both low gate delay and low energy-delay product, as well as high Ion/loff ratios are required. The current status of these emerging nanoelectronic devices in light of the above metrics will be described in this talk. In addition, the merits and shortcomings, as well as the physics of operation of these devices, will be described. In addition to the above device aspects, the material and integration (onto silicon) aspects of these emerging nanotechnologies are significant as well. These non-Si materials will not replace Si, rather they will need to be integrated onto the silicon substrate. Both CNTs and semiconductor nanowires are formed using "bottom-up" chemical syntheses, and they currently suffer from the fundamental placement problem, i.e., there exists no practical nor reliable way to precisely align and position them. On the other hand, Ill-V and Ge materials can be patterned into desirable device structures using conventional "top-down" lithographic and etch techniques. In this regard, III-Vs and Ge are considered far more practical than CNTs and nanowires for future high-speed, low-power nanoelectronic device applications. In fact, Ill-V materials have been used in communication and optoelectronic products for quite some time. However, many significant challenges remain for III-V materials to become applicable for future high-speed, low-power logic applications. These include (i) finding a gate dielectric compatible with III-Vs, (ii) demonstrating transistor gate length scalability below 35 nm with acceptable Ion/loff ratio, (iii) improving the hole mobility in III-Vs or finding the right p-channel FET for the complementary metal-oxide-semiconductor (CMOS) configuration, and (iv) integrating Ill-V materials onto the Si substrate. While these are difficult challenges, much progress has been made recently [4,6]. If these problems can indeed be solved, III-Vs will play a major role in conjunction with silicon in future logic nanoelectronics. These challenges, along with potential solutions and recent progress, will be addressed in this presentation.
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