大规模集成电路封装中接口微窝的防分层效应分析

Mitsuru Sato, S. Yoshioka, A. Inoue, S. Tani, Makoto Iwaoka
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引用次数: 3

摘要

在模垫与树脂之间进行分层抑制是防止LSI封装树脂开裂的有效方法。在一些LSI封装中,排列在晶片上的凹槽可以有效地阻止分层。在本研究中,基于边界元分析,研究了在热和蒸汽压力加载条件下,微窝对LSI封装的分层阻止的影响。为了评估这种影响,利用界面裂纹表面之间的接触来计算界面裂纹的应力强度因子ki。得到了以下主要结果。(1)在热负荷和汽压负荷条件下,凹窝均能降低K i。(2)减小K i的主要原因是防止热载荷条件下裂纹表面之间的剪切变形。相反,在蒸汽压力载荷条件下,界面裂纹尖端的扭结是导致裂纹减少的原因。(3)随韧窝深度的增加,止裂效果增强。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Analyses of Delamination Arrest Effect of Dimples on Interface in LSI Package
The delamination arrest between die pad and resin should be an efficient method to prevent resin cracking of LSI packages. In some LSI packages, dimples arranged on the die pad are effective for delamination arrest. In this study, the effects of dimples on delamination arrest are examined based on boundary element analyses of LSI packages under conditions of thermal and steam pressure loading. To evaluate this effect, the stress intensity factor, K i , for an interface crack was calculated using the contact between interface crack surfaces. The following main results were obtained. (1) The dimple decreases K i under both thermal and steam pressure load conditions. (2) The main reason for decreasing K i is to prevent shearing deformation between crack surfaces under thermal load conditions. Conversely, the reason for the decrease is the kinking of interface crack tips under steam pressure load conditions. (3 ) The effect of delamination arrest increases as the dimple depth increases.
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